Open access peer-reviewed chapter

Compilation on Synthesis, Characterization and Properties of Silicon and Boron Carbonitride Films

By P. Hoffmann, N. Fainer, M. Kosinova, O. Baake and W. Ensinger

Submitted: December 5th 2010Reviewed: April 15th 2011Published: October 10th 2011

DOI: 10.5772/24330

Downloaded: 4033

© 2011 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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P. Hoffmann, N. Fainer, M. Kosinova, O. Baake and W. Ensinger (October 10th 2011). Compilation on Synthesis, Characterization and Properties of Silicon and Boron Carbonitride Films, Silicon Carbide Moumita Mukherjee, IntechOpen, DOI: 10.5772/24330. Available from:

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