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Materials Science » Semiconductors » "Silicon Carbide - Materials, Processing and Applications in Electronic Devices", book edited by Moumita Mukherjee, ISBN 978-953-307-968-4, Published: October 10, 2011 under CC BY 3.0 license. © The Author(s).

Chapter 21

Compilation on Synthesis, Characterization and Properties of Silicon and Boron Carbonitride Films

By P. Hoffmann, N. Fainer, M. Kosinova, O. Baake and W. Ensinger
DOI: 10.5772/24330