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Compilation on Synthesis, Characterization and Properties of Silicon and Boron Carbonitride Films

Written By

P. Hoffmann, N. Fainer, M. Kosinova, O. Baake and W. Ensinger

Submitted: 05 December 2010 Published: 10 October 2011

DOI: 10.5772/24330

From the Edited Volume

Silicon Carbide - Materials, Processing and Applications in Electronic Devices

Edited by Moumita Mukherjee

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Written By

P. Hoffmann, N. Fainer, M. Kosinova, O. Baake and W. Ensinger

Submitted: 05 December 2010 Published: 10 October 2011