Open access peer-reviewed chapter

Three-Dimensional Silicon Smart Tactile Imager Using Large Deformation of Swollen Diaphragm with Integrated Piezoresistor Pixel Circuits

By Hidekuni Takao and Makoto Ishida

Published: December 1st 2008

DOI: 10.5772/6616

Downloaded: 2002

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Hidekuni Takao and Makoto Ishida (December 1st 2008). Three-Dimensional Silicon Smart Tactile Imager Using Large Deformation of Swollen Diaphragm with Integrated Piezoresistor Pixel Circuits, Sensors: Focus on Tactile Force and Stress Sensors, Jose Gerardo Rocha and Senentxu Lanceros-Mendez, IntechOpen, DOI: 10.5772/6616. Available from:

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