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Advanced Plasma Processing: Etching, Deposition, and Wafer Bonding Techniques for Semiconductor Applications

Written By

Michael Shearn, Xiankai Sun, M. David Henry, Amnon Yariv and Axel Scherer

Published: 01 April 2010

DOI: 10.5772/8564

From the Edited Volume

Semiconductor Technologies

Edited by Jan Grym

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Written By

Michael Shearn, Xiankai Sun, M. David Henry, Amnon Yariv and Axel Scherer

Published: 01 April 2010