Open access peer-reviewed chapter

Preparation and Characterization of Dielectric Thin Films by RF Magnetron-Sputtering with (Ba0.3Sr0.7)(Zn1/3Nb2/3)O3 Ceramic Target

By Feng Shi

Submitted: May 13th 2011Reviewed: August 22nd 2011Published: March 9th 2012

DOI: 10.5772/35655

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Feng Shi (March 9th 2012). Preparation and Characterization of Dielectric Thin Films by RF Magnetron-Sputtering with (Ba0.3Sr0.7)(Zn1/3Nb2/3)O3 Ceramic Target, Scanning Electron Microscopy Viacheslav Kazmiruk, IntechOpen, DOI: 10.5772/35655. Available from:

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