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Soft UV Nanoimprint Lithography: A Versatile Tool for Nanostructuration at the 20nm Scale

By Andrea Cattoni, Jing Chen, Dominique Decanini, Jian Shi and Anne-Marie Haghiri-Gosnet

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Published: December 2nd 2011

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Andrea Cattoni, Jing Chen, Dominique Decanini, Jian Shi and Anne-Marie Haghiri-Gosnet (December 2nd 2011). Soft UV Nanoimprint Lithography: A Versatile Tool for Nanostructuration at the 20nm Scale, Recent Advances in Nanofabrication Techniques and Applications Bo Cui, IntechOpen, DOI: 10.5772/21874. Available from:

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