Open access peer-reviewed chapter

Nanolithography Study Using Scanning Probe Microscope

By S. Sadegh Hassani and H. R. Aghabozorg

Submitted: November 10th 2010Reviewed: April 24th 2011Published: December 2nd 2011

DOI: 10.5772/20881

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S. Sadegh Hassani and H. R. Aghabozorg (December 2nd 2011). Nanolithography Study Using Scanning Probe Microscope, Recent Advances in Nanofabrication Techniques and Applications, Bo Cui, IntechOpen, DOI: 10.5772/20881. Available from:

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