Open access peer-reviewed chapter

Laser-Plasma Extreme Ultraviolet Source Incorporating a Cryogenic Xe Target

By Sho Amano

Submitted: November 19th 2010Reviewed: April 20th 2011Published: December 2nd 2011

DOI: 10.5772/22403

Downloaded: 1957

© 2011 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Sho Amano (December 2nd 2011). Laser-Plasma Extreme Ultraviolet Source Incorporating a Cryogenic Xe Target, Recent Advances in Nanofabrication Techniques and Applications Bo Cui, IntechOpen, DOI: 10.5772/22403. Available from:

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