Open access peer-reviewed chapter

Laser-Plasma Extreme Ultraviolet Source Incorporating a Cryogenic Xe Target

By Sho Amano

Submitted: November 19th 2010Reviewed: April 20th 2011Published: December 2nd 2011

DOI: 10.5772/22403

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Sho Amano (December 2nd 2011). Laser-Plasma Extreme Ultraviolet Source Incorporating a Cryogenic Xe Target, Recent Advances in Nanofabrication Techniques and Applications, Bo Cui, IntechOpen, DOI: 10.5772/22403. Available from:

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