Open access peer-reviewed chapter

High-Index Immersion Lithography

By Keita Sakai

Submitted: November 29th 2010Reviewed: April 22nd 2011Published: December 2nd 2011

DOI: 10.5772/23630

Downloaded: 3040

© 2011 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Keita Sakai (December 2nd 2011). High-Index Immersion Lithography, Recent Advances in Nanofabrication Techniques and Applications, Bo Cui, IntechOpen, DOI: 10.5772/23630. Available from:

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