Open access peer-reviewed chapter

High-Index Immersion Lithography

By Keita Sakai

Submitted: November 29th 2010Reviewed: April 22nd 2011Published: December 2nd 2011

DOI: 10.5772/23630

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Keita Sakai (December 2nd 2011). High-Index Immersion Lithography, Recent Advances in Nanofabrication Techniques and Applications, Bo Cui, IntechOpen, DOI: 10.5772/23630. Available from:

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