Open access peer-reviewed chapter

Focused Ion Beam Lithography

By Heinz D. Wanzenboeck and Simon Waid

Submitted: November 17th 2010Reviewed: July 6th 2011Published: December 2nd 2011

DOI: 10.5772/22075

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Heinz D. Wanzenboeck and Simon Waid (December 2nd 2011). Focused Ion Beam Lithography, Recent Advances in Nanofabrication Techniques and Applications, Bo Cui, IntechOpen, DOI: 10.5772/22075. Available from:

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