Open access peer-reviewed chapter

Focused Ion Beam Lithography

By Heinz D. Wanzenboeck and Simon Waid

Submitted: November 17th 2010Reviewed: July 6th 2011Published: December 2nd 2011

DOI: 10.5772/22075

Downloaded: 9849

© 2011 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Heinz D. Wanzenboeck and Simon Waid (December 2nd 2011). Focused Ion Beam Lithography, Recent Advances in Nanofabrication Techniques and Applications, Bo Cui, IntechOpen, DOI: 10.5772/22075. Available from:

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