Open access peer-reviewed chapter

Fabrication of 3-D Structures Utilizing Synchrotron Radiation Lithography

By Mitsuhiro Horade and Susumu Sugiyama

Submitted: December 6th 2010Reviewed: May 6th 2011Published: December 2nd 2011

DOI: 10.5772/24371

Downloaded: 1967

© 2011 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Mitsuhiro Horade and Susumu Sugiyama (December 2nd 2011). Fabrication of 3-D Structures Utilizing Synchrotron Radiation Lithography, Recent Advances in Nanofabrication Techniques and Applications Bo Cui, IntechOpen, DOI: 10.5772/24371. Available from:

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