InTechOpen uses cookies to offer you the best online experience. By continuing to use our site, you agree to our Privacy Policy.

Nanotechnology and Nanomaterials » "Recent Advances in Nanofabrication Techniques and Applications", book edited by Bo Cui, ISBN 978-953-307-602-7, Published: December 2, 2011 under CC BY 3.0 license. © The Author(s).

Chapter 17

Emerging Maskless Nanolithography Based on Novel Diffraction Gratings

By Guanxiao Cheng, Yong Yang, Chao Hu, Ping Xu, Helun Song, Tingwen Xing and Max Q.-H. Meng
DOI: 10.5772/22265