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Electron Beam Lithography for Fine Dot Arrays with Nanometer-Sized Dot and Pitch

By Sumio Hosaka

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Published: December 2nd 2011

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Sumio Hosaka (December 2nd 2011). Electron Beam Lithography for Fine Dot Arrays with Nanometer-Sized Dot and Pitch, Recent Advances in Nanofabrication Techniques and Applications Bo Cui, IntechOpen, DOI: 10.5772/20711. Available from:

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