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DUV Interferometry for Micro and Nanopatterned Surfaces

By Olivier Soppera, Ali Dirani, Fabrice Stehlin, Hassan Ridaoui, Arnaud Spangenberg, Fernand Wieder and Vincent Roucoules

Submitted: November 10th 2010Reviewed: July 15th 2011Published: December 2nd 2011

DOI: 10.5772/20896

Downloaded: 2046

© 2011 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Olivier Soppera, Ali Dirani, Fabrice Stehlin, Hassan Ridaoui, Arnaud Spangenberg, Fernand Wieder and Vincent Roucoules (December 2nd 2011). DUV Interferometry for Micro and Nanopatterned Surfaces, Recent Advances in Nanofabrication Techniques and Applications Bo Cui, IntechOpen, DOI: 10.5772/20896. Available from:

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