Open access peer-reviewed chapter

Character Projection Lithography for Application-Specific Integrated Circuits

By Makoto Sugihara

Submitted: November 25th 2010Reviewed: May 26th 2011Published: December 2nd 2011

DOI: 10.5772/23269

Downloaded: 1599

© 2011 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to cite and reference

Link to this chapter Copy to clipboard

Cite this chapter Copy to clipboard

Makoto Sugihara (December 2nd 2011). Character Projection Lithography for Application-Specific Integrated Circuits, Recent Advances in Nanofabrication Techniques and Applications Bo Cui, IntechOpen, DOI: 10.5772/23269. Available from:

Embed this chapter on your site Copy to clipboard

<iframe src="http://www.intechopen.com/embed/recent-advances-in-nanofabrication-techniques-and-applications/character-projection-lithography-for-application-specific-integrated-circuits" />

Embed this code snippet in the HTML of your website to show this chapter

chapter statistics

1599total chapter downloads

More statistics for editors and authors

Login to your personal dashboard for more detailed statistics on your publications.

Access personal reporting

Related Content

This Book

Recent Advances in Nanofabrication Techniques and Applications

Edited by Bo Cui

Next chapter

Transform-Based Lossless Image Compression Algorithm for Electron Beam Direct Write Lithography Systems

By Jeehong Yang and Serap A. Savari

Related Book

First chapter

Liposomes as Potential Drug Carrier Systems for Drug Delivery

By Melis Çağdaş, Ali Demir Sezer and Seyda Bucak

We are IntechOpen, the first native scientific publisher of Open Access books. Our readership spans scientists, professors, researchers, librarians, and students, as well as business professionals. We share our knowledge and peer-reveiwed research papers with libraries, scientific and engineering societies, and also work with corporate R&D departments and government entities.

+3,350 Open Access Books

+57,400 Citations in Web of Science

+107,500 IntechOpen Authors and Academic Editors

+560,000 Unique visitors per month

More about us