Open access peer-reviewed chapter

Atom Lithography: Fabricating Arrays of Silicon Microstructures Using Self-Assembled Monolayer Resist and Metastable Helium Beam

By Jianwu Zhang, Zhongping Wang and Zengming Zhang

Submitted: November 11th 2010Reviewed: June 28th 2011Published: December 2nd 2011

DOI: 10.5772/21007

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Jianwu Zhang, Zhongping Wang and Zengming Zhang (December 2nd 2011). Atom Lithography: Fabricating Arrays of Silicon Microstructures Using Self-Assembled Monolayer Resist and Metastable Helium Beam, Recent Advances in Nanofabrication Techniques and Applications Bo Cui, IntechOpen, DOI: 10.5772/21007. Available from:

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