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Nanotechnology and Nanomaterials » "Recent Advances in Nanofabrication Techniques and Applications", book edited by Bo Cui, ISBN 978-953-307-602-7, Published: December 2, 2011 under CC BY 3.0 license. © The Author(s).

Chapter 3

Atom Lithography: Fabricating Arrays of Silicon Microstructures Using Self-Assembled Monolayer Resist and Metastable Helium Beam

By Jianwu Zhang, Zhongping Wang and Zengming Zhang
DOI: 10.5772/21007