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Atom Lithography: Fabricating Arrays of Silicon Microstructures Using Self-Assembled Monolayer Resist and Metastable Helium Beam

By Jianwu Zhang, Zhongping Wang and Zengming Zhang

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Published: December 2nd 2011

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Jianwu Zhang, Zhongping Wang and Zengming Zhang (December 2nd 2011). Atom Lithography: Fabricating Arrays of Silicon Microstructures Using Self-Assembled Monolayer Resist and Metastable Helium Beam, Recent Advances in Nanofabrication Techniques and Applications Bo Cui, IntechOpen, DOI: 10.5772/21007. Available from:

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