Open access peer-reviewed chapter

MEMS-Based Terahertz Photoacoustic Chemical Sensing System

By Nathan Glauvitz, Ronald A. Coutu, Ivan R. Medvedev and Douglas T. Petkie

Submitted: October 2nd 2015Reviewed: February 18th 2016Published: August 24th 2016

DOI: 10.5772/62571

Downloaded: 753

© 2016 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Nathan Glauvitz, Ronald A. Coutu, Ivan R. Medvedev and Douglas T. Petkie (August 24th 2016). MEMS-Based Terahertz Photoacoustic Chemical Sensing System, Progresses in Chemical Sensor Wen Wang, IntechOpen, DOI: 10.5772/62571. Available from:

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