Open access peer-reviewed chapter

Air-Suspended Silicon Micro-Bridge Structures for Metal Oxide- Based Gas Sensing

By Keshavaditya Golla and Eranna Golla

Submitted: October 2nd 2015Reviewed: February 22nd 2016Published: August 24th 2016

DOI: 10.5772/62647

Downloaded: 495

© 2016 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Keshavaditya Golla and Eranna Golla (August 24th 2016). Air-Suspended Silicon Micro-Bridge Structures for Metal Oxide- Based Gas Sensing, Progresses in Chemical Sensor Wen Wang, IntechOpen, DOI: 10.5772/62647. Available from:

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