Open access peer-reviewed chapter

Simulation-Based Modular Scheduling System of Semiconductor Manufacturing

By Li Li, Qiao Fei Ma Yumin and Ye Kai

Submitted: February 6th 2011Reviewed: August 15th 2011Published: January 11th 2012

DOI: 10.5772/26257

Downloaded: 2661

© 2012 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Li Li, Qiao Fei Ma Yumin and Ye Kai (January 11th 2012). Simulation-Based Modular Scheduling System of Semiconductor Manufacturing, Production Scheduling Rodrigo da Rosa Righi, IntechOpen, DOI: 10.5772/26257. Available from:

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