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Piezoelectric Thin Film Deposition: Novel Self-Assembled Island Structures and Low Temperature Processes on Silicon

By Sharath Sriram, Madhu Bhaskaran and Arnan Mitchell

Published: October 5th 2010

DOI: 10.5772/9937

Downloaded: 3136

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Sharath Sriram, Madhu Bhaskaran and Arnan Mitchell (October 5th 2010). Piezoelectric Thin Film Deposition: Novel Self-Assembled Island Structures and Low Temperature Processes on Silicon, Piezoelectric Ceramics, Ernesto Suaste-Gomez, IntechOpen, DOI: 10.5772/9937. Available from:

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