InTechOpen uses cookies to offer you the best online experience. By continuing to use our site, you agree to our Privacy Policy.

Materials Science » Metals and Nonmetals » "Physics and Technology of Silicon Carbide Devices", book edited by Yasuto Hijikata, ISBN 978-953-51-0917-4, Published: October 16, 2012 under CC BY 3.0 license. © The Author(s).

Chapter 10

Tailoring Oxide/Silicon Carbide Interfaces: NO Annealing and Beyond

By John Rozen
DOI: 10.5772/54396