Open access peer-reviewed chapter

Silicon Carbide: A Biocompatible Semiconductor Used in Advanced Biosensors and BioMEMS/NEMS

By Mahboobeh Mahmoodi and Lida Ghazanfari

Submitted: March 17th 2012Reviewed: July 23rd 2012Published: October 16th 2012

DOI: 10.5772/51811

Downloaded: 2092

© 2012 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Mahboobeh Mahmoodi and Lida Ghazanfari (October 16th 2012). Silicon Carbide: A Biocompatible Semiconductor Used in Advanced Biosensors and BioMEMS/NEMS, Physics and Technology of Silicon Carbide Devices Yasuto Hijikata, IntechOpen, DOI: 10.5772/51811. Available from:

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