Open access peer-reviewed chapter

Materials and Processing for Gate Dielectrics on Silicon Carbide (SiC) Surface

By Sanjeev Kumar Gupta, Jitendra Singh and Jamil Akhtar

Submitted: March 27th 2012Reviewed: August 21st 2012Published: October 16th 2012

DOI: 10.5772/52553

Downloaded: 4379

© 2012 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Sanjeev Kumar Gupta, Jitendra Singh and Jamil Akhtar (October 16th 2012). Materials and Processing for Gate Dielectrics on Silicon Carbide (SiC) Surface, Physics and Technology of Silicon Carbide Devices Yasuto Hijikata, IntechOpen, DOI: 10.5772/52553. Available from:

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