Open access peer-reviewed chapter

Silicon–Rich Silicon Oxide Thin Films Fabricated by Electro-Chemical Method

By Pham Van Hoi, Do Thuy Chi, Bui Huy and Nguyen Thuy Van

Submitted: November 3rd 2010Reviewed: June 30th 2011Published: September 26th 2011

DOI: 10.5772/19289

Downloaded: 2957

© 2011 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution-NonCommercial-ShareAlike-3.0 License, which permits use, distribution and reproduction for non-commercial purposes, provided the original is properly cited and derivative works building on this content are distributed under the same license.

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Pham Van Hoi, Do Thuy Chi, Bui Huy and Nguyen Thuy Van (September 26th 2011). Silicon–Rich Silicon Oxide Thin Films Fabricated by Electro-Chemical Method, Optoelectronics Padmanabhan Predeep, IntechOpen, DOI: 10.5772/19289. Available from:

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