Open access peer-reviewed chapter

Fabrication and Characterization of As Doped p-Type ZnO Films Grown by Magnetron Sputtering

By J.C. Fan, C.C. Ling and Z. Xie

Submitted: November 2nd 2010Reviewed: June 30th 2011Published: September 26th 2011

DOI: 10.5772/19233

Downloaded: 2974

© 2011 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution-NonCommercial-ShareAlike-3.0 License, which permits use, distribution and reproduction for non-commercial purposes, provided the original is properly cited and derivative works building on this content are distributed under the same license.

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J.C. Fan, C.C. Ling and Z. Xie (September 26th 2011). Fabrication and Characterization of As Doped p-Type ZnO Films Grown by Magnetron Sputtering, Optoelectronics - Materials and Techniques, Padmanabhan Predeep, IntechOpen, DOI: 10.5772/19233. Available from:

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