Open access peer-reviewed chapter

Integrating Micro-Photonic Systems and MOEMS into Standard Silicon CMOS Integrated Circuitry

By Lukas W. Snyman

Submitted: October 29th 2010Reviewed: May 24th 2011Published: October 5th 2011

DOI: 10.5772/18810

Downloaded: 1955

© 2011 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Lukas W. Snyman (October 5th 2011). Integrating Micro-Photonic Systems and MOEMS into Standard Silicon CMOS Integrated Circuitry, Optoelectronics P. Predeep, IntechOpen, DOI: 10.5772/18810. Available from:

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