Open access peer-reviewed chapter

Integrating Micro-Photonic Systems and MOEMS into Standard Silicon CMOS Integrated Circuitry

By Lukas W. Snyman

Submitted: October 29th 2010Reviewed: May 24th 2011Published: October 5th 2011

DOI: 10.5772/18810

Downloaded: 2175

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Lukas W. Snyman (October 5th 2011). Integrating Micro-Photonic Systems and MOEMS into Standard Silicon CMOS Integrated Circuitry, Optoelectronics - Devices and Applications, Padmanabhan Predeep, IntechOpen, DOI: 10.5772/18810. Available from:

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