Open access peer-reviewed chapter

Interferometry for Online/In-Process Surface Inspection

By Feng Gao

Submitted: June 1st 2016Reviewed: October 25th 2016Published: February 15th 2017

DOI: 10.5772/66530

Downloaded: 449

© 2017 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Feng Gao (February 15th 2017). Interferometry for Online/In-Process Surface Inspection, Optical Interferometry Alexandr Banishev, IntechOpen, DOI: 10.5772/66530. Available from:

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