Open access peer-reviewed chapter

Interferometry and its Applications in Surface Metrology

By Dahi Ghareab Abdelsalam and Baoli Yao

Submitted: May 25th 2016Reviewed: October 10th 2016Published: February 15th 2017

DOI: 10.5772/66275

Downloaded: 853

© 2017 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Dahi Ghareab Abdelsalam and Baoli Yao (February 15th 2017). Interferometry and its Applications in Surface Metrology, Optical Interferometry Alexandr Banishev, IntechOpen, DOI: 10.5772/66275. Available from:

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