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Computer and Information Science » Numerical Analysis and Scientific Computing » "Numerical Simulations of Physical and Engineering Processes", book edited by Jan Awrejcewicz, ISBN 978-953-307-620-1, Published: September 26, 2011 under CC BY-NC-SA 3.0 license. © The Author(s).

Chapter 22

Measurement Uncertainty of White-Light Interferometry on Optically Rough Surfaces

By Pavel Pavlíček
DOI: 10.5772/24642