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Materials Science » Metals and Nonmetals » "Noble Metals", book edited by Yen-Hsun Su, ISBN 978-953-307-898-4, Published: February 1, 2012 under CC BY 3.0 license. © The Author(s).

Chapter 11

Nano/Micro-Patterning of Semiconductors by Site Selective Chemical Etching Using Noble Metals as Catalyst

By Sachiko Ono and Hidetaka Asoh
DOI: 10.5772/34387