Open access peer-reviewed chapter

Atomic Layer Deposition of Noble Metals – New Developments in Nanostructured Catalysts

By Junling Lu, Yu Lei and Jeffrey W. Elam

Submitted: April 15th 2011Reviewed: October 12th 2011Published: February 1st 2012

DOI: 10.5772/33082

Downloaded: 3144

© 2012 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Junling Lu, Yu Lei and Jeffrey W. Elam (February 1st 2012). Atomic Layer Deposition of Noble Metals – New Developments in Nanostructured Catalysts, Noble Metals Yen-Hsun Su, IntechOpen, DOI: 10.5772/33082. Available from:

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