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The Wafer Alignment Algorithm Regardless of Rotational Center

Written By

HyungTae Kim, HaeJeong Yang and SungChul Kim

Published: 01 May 2008

DOI: 10.5772/5406

From the Edited Volume

New Approaches in Automation and Robotics

Edited by Harald Aschemann

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Written By

HyungTae Kim, HaeJeong Yang and SungChul Kim

Published: 01 May 2008