Open access peer-reviewed chapter

The Wafer Alignment Algorithm Regardless of Rotational Center

By HyungTae Kim, HaeJeong Yang and SungChul Kim

Published: May 1st 2008

DOI: 10.5772/5406

Downloaded: 2991

© 2008 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution-NonCommercial-ShareAlike-3.0 License, which permits use, distribution and reproduction for non-commercial purposes, provided the original is properly cited and derivative works building on this content are distributed under the same license.

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HyungTae Kim, HaeJeong Yang and SungChul Kim (May 1st 2008). The Wafer Alignment Algorithm Regardless of Rotational Center, New Approaches in Automation and Robotics, Harald Aschemann, IntechOpen, DOI: 10.5772/5406. Available from:

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