Open access peer-reviewed chapter

Hydrogenation of Polycrystalline Silicon Thin‐Film Transistors

By Akito Hara and Kuninori Kitahara

Submitted: April 10th 2016Reviewed: August 11th 2016Published: January 25th 2017

DOI: 10.5772/65210

Downloaded: 471

© 2017 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Akito Hara and Kuninori Kitahara (January 25th 2017). Hydrogenation of Polycrystalline Silicon Thin‐Film Transistors, New Advances in Hydrogenation Processes Maryam Takht Ravanchi, IntechOpen, DOI: 10.5772/65210. Available from:

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