Open access peer-reviewed chapter

Silicon-Based Nanowire MOSFETs: From Process and Device Physics to Simulation and Modeling

By Jin He, Haijun Lou, Lining Zhang and Mansun Chan

Submitted: October 9th 2010Reviewed: February 24th 2011Published: July 18th 2011

DOI: 10.5772/16345

Downloaded: 3606

© 2011 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution-NonCommercial-ShareAlike-3.0 License, which permits use, distribution and reproduction for non-commercial purposes, provided the original is properly cited and derivative works building on this content are distributed under the same license.

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Jin He, Haijun Lou, Lining Zhang and Mansun Chan (July 18th 2011). Silicon-Based Nanowire MOSFETs: From Process and Device Physics to Simulation and Modeling, Nanowires Abbass Hashim, IntechOpen, DOI: 10.5772/16345. Available from:

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