Open access peer-reviewed chapter

Surface Modification of III-V Compounds Substrates for Processing Technology

By Rodica V. Ghita, Constantin Logofatu, Constantin-Catalin Negrila, Lucian Trupina and Costel Cotirlan-Simioniuc

Submitted: October 13th 2016Reviewed: February 16th 2017Published: May 24th 2017

DOI: 10.5772/67916

Downloaded: 514

© 2017 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Rodica V. Ghita, Constantin Logofatu, Constantin-Catalin Negrila, Lucian Trupina and Costel Cotirlan-Simioniuc (May 24th 2017). Surface Modification of III-V Compounds Substrates for Processing Technology, Nanoscaled Films and Layers Laszlo Nanai, IntechOpen, DOI: 10.5772/67916. Available from:

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