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Nanotechnology and Nanomaterials » "Nanofabrication", book edited by Yoshitake Masuda, ISBN 978-953-307-912-7, Published: December 22, 2011 under CC BY 3.0 license. © The Author(s).

Chapter 11

Evaluation of Nanometer Cutting Tool Edge for Nanofabrication

By Yuki Shimizu, Takemi Asai and Wei Gao
DOI: 10.5772/28581