Open access peer-reviewed chapter

Evaluation of Nanometer Cutting Tool Edge for Nanofabrication

By Yuki Shimizu, Takemi Asai and Wei Gao

Submitted: March 1st 2011Reviewed: July 19th 2011Published: December 22nd 2011

DOI: 10.5772/28581

Downloaded: 2375

© 2011 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Yuki Shimizu, Takemi Asai and Wei Gao (December 22nd 2011). Evaluation of Nanometer Cutting Tool Edge for Nanofabrication, Nanofabrication, Yoshitake Masuda, IntechOpen, DOI: 10.5772/28581. Available from:

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