Open access peer-reviewed chapter

Nanomachining of Fused Quartz Using Atomic Force Microscope

By Yoshio Ichida

Submitted: October 18th 2015Reviewed: May 30th 2016Published: July 27th 2016

DOI: 10.5772/64408

Downloaded: 619

© 2016 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Yoshio Ichida (July 27th 2016). Nanomachining of Fused Quartz Using Atomic Force Microscope, Nanoelectronics and Materials Development Abhijit Kar, IntechOpen, DOI: 10.5772/64408. Available from:

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