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Synthesis and Characterization of Ti-Si-C-N Nanocomposite Coatings Prepared by a Filtered Vacuum Arc with Organosilane Precursors

By Seunghun Lee, P. Vijai Bharathy, T. Elangovan, Do-Geun Kim and Jong-Kuk Kim

Submitted: February 29th 2012Reviewed: June 26th 2012Published: September 27th 2012

DOI: 10.5772/51059

Downloaded: 1633

© 2012 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Seunghun Lee, P. Vijai Bharathy, T. Elangovan, Do-Geun Kim and Jong-Kuk Kim (September 27th 2012). Synthesis and Characterization of Ti-Si-C-N Nanocomposite Coatings Prepared by a Filtered Vacuum Arc with Organosilane Precursors, Nanocomposites Farzad Ebrahimi, IntechOpen, DOI: 10.5772/51059. Available from:

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