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Biochemistry, Genetics and Molecular Biology » "Molecular Dynamics - Studies of Synthetic and Biological Macromolecules", book edited by Lichang Wang, ISBN 978-953-51-0444-5, Published: April 11, 2012 under CC BY 3.0 license. © The Author(s).

Chapter 11

Application of Molecular Dynamics Simulations to Plasma Etch Damage in Advanced Metal-Oxide-Semiconductor Field-Effect Transistors

By Koji Eriguchi
DOI: 10.5772/36394