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Silicon Oxycarbide Thin films and Nanostructures: Synthesis, Properties and Applications

By Spyros Gallis, Vasileios Nikas and Alain E. Kaloyeros

Submitted: June 2nd 2016Reviewed: November 21st 2016Published: March 8th 2017

DOI: 10.5772/66992

Downloaded: 842

© 2017 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Spyros Gallis, Vasileios Nikas and Alain E. Kaloyeros (March 8th 2017). Silicon Oxycarbide Thin films and Nanostructures: Synthesis, Properties and Applications, Modern Technologies for Creating the Thin-film Systems and Coatings Nikolay N. Nikitenkov, IntechOpen, DOI: 10.5772/66992. Available from:

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