Open access peer-reviewed chapter

Modification of Oxide Thin Films with Low-Energy Ion Bombardment

By Oscar Rodríguez de la Fuente

Submitted: June 9th 2016Reviewed: October 28th 2016Published: March 8th 2017

DOI: 10.5772/66651

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© 2017 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Oscar Rodríguez de la Fuente (March 8th 2017). Modification of Oxide Thin Films with Low-Energy Ion Bombardment, Modern Technologies for Creating the Thin-film Systems and Coatings Nikolay N. Nikitenkov, IntechOpen, DOI: 10.5772/66651. Available from:

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