Open access peer-reviewed chapter

Conventional and Un-Conventional Lithography for Fabricating Thin Film Functional Devices

By Abdelhanin Aassime and Frederic Hamouda

Submitted: May 26th 2016Reviewed: September 27th 2016Published: March 8th 2017

DOI: 10.5772/66028

Downloaded: 610

© 2017 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Abdelhanin Aassime and Frederic Hamouda (March 8th 2017). Conventional and Un-Conventional Lithography for Fabricating Thin Film Functional Devices, Modern Technologies for Creating the Thin-film Systems and Coatings Nikolay N. Nikitenkov, IntechOpen, DOI: 10.5772/66028. Available from:

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