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Technology » "Modern Metrology Concerns", book edited by Luigi Cocco, ISBN 978-953-51-0584-8, Published: May 16, 2012 under CC BY 3.0 license. © The Author(s).

Chapter 4

Nano-Accuracy Surface Figure Metrology of Precision Optics

By Shinan Qian and Peter Takacs
DOI: 10.5772/37100