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Defect Engineering During Czochralski Crystal Growth and Silicon Wafer Manufacturing

By Lukáš Válek and Jan Šik

Submitted: March 11th 2011Reviewed: August 24th 2011Published: January 13th 2012

DOI: 10.5772/29816

Downloaded: 12280

© 2012 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Lukáš Válek and Jan Šik (January 13th 2012). Defect Engineering During Czochralski Crystal Growth and Silicon Wafer Manufacturing, Modern Aspects of Bulk Crystal and Thin Film Preparation, Nikolai Kolesnikov and Elena Borisenko, IntechOpen, DOI: 10.5772/29816. Available from:

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