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Controlled Growth of C-Oriented AlN Thin Films: Experimental Deposition and Characterization

By Manuel García-Méndez

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Published: January 13th 2012

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Manuel García-Méndez (January 13th 2012). Controlled Growth of C-Oriented AlN Thin Films: Experimental Deposition and Characterization, Modern Aspects of Bulk Crystal and Thin Film Preparation Nikolai Kolesnikov, IntechOpen, DOI: 10.5772/28040. Available from:

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