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Combination of Acoustic Methods and the Indentation Technique for the Measurement of Film Properties

By Fabio Di Fonzo, Francisco García Ferré, Dario Gastaldi, Pasquale Vena and Marco G. Beghi

Submitted: July 8th 2013Reviewed: July 8th 2013Published: August 28th 2013

DOI: 10.5772/56815

Downloaded: 1329

© 2013 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Fabio Di Fonzo, Francisco García Ferré, Dario Gastaldi, Pasquale Vena and Marco G. Beghi (August 28th 2013). Combination of Acoustic Methods and the Indentation Technique for the Measurement of Film Properties, Modeling and Measurement Methods for Acoustic Waves and for Acoustic Microdevices Marco G. Beghi, IntechOpen, DOI: 10.5772/56815. Available from:

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