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Engineering » Electrical and Electronic Engineering » "Microsensors", book edited by Igor Minin, ISBN 978-953-307-170-1, Published: June 9, 2011 under CC BY-NC-SA 3.0 license. © The Author(s).

Chapter 11

Strength Reliability of Micro Polycrystalline Silicon Structure

By Shigeru Hamada, Kenji Hasizume, Hiroyuki Nakaura and Yoshihide Sugimoto
DOI: 10.5772/17032